Process Equipment

We provide a range of products and services in the area of semiconductor processing. Application areas include, etching/deposition of metals and oxides, nano-structure fabrication and measurement techniques.

Key Areas
  Sputtering systems and tools for deposition of metals and oxides: Titanium, Moly, Aluminium, Copper, Gold, Chrome, Silicon Dioxide, Silicon Nitride.
  Dry etching systems including plasma ashing.
  Electron-beam lithography systems for nano-fabrication.
  Analytical measurement tools including ellipsometers, nano-spec, profileometers.

 

If you have any queries please email to info@asps.co.uk
7th September, 2006